Solar Equipment
Rehm Thermal Systems GmbHRequest Info
Rehm Thermal Systems GmbH has launched the Solardryer RDS 2100
and RDS 3000 for metallization lines. The drying process consists of a combination
of five infrared zones and one central convection zone, offering temperature profiling
that can be adjusted for precision and flexibility. These horizontal throughput
systems guarantee a safe transport through the oven via either mesh belt or with
pin chain up to three lanes. In the mesh belt systems, the conveyor of the heating
zone can be separated from that of the cooling zone so that no latent heat is carried
into the cooling area, offering a higher cooling gradient and a shorter oven. And
at belt speeds of up to 6 m/min, the RDS series provides high throughput of up to
5700 wafers/h. They enable new levels of metallization process performance with
features including single-, dual- and triple-lane handling of wafers, an integrated
residue management system that maintains a clean process chamber and extends maintenance
intervals, and profile control and process monitoring, including reference products
for baseline profiling.
https://www.rehm-group.com
/Buyers_Guide/Rehm_Thermal_Systems_GmbH/c18307
Published: October 2010
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