Metrios, Talos, Titan Themis TEM Systems
HILLSBORO, Ore., Aug. 20, 2013 — FEI Co. has introduced three new transmission electron microscopy (TEM) systems. The Metrios is for semiconductor manufacturing metrology, the Talos is for materials and life sciences applications, and the Titan Themis is for atomic-scale measurement of material properties.
The Metrios provides precise measurements for developing and controlling the wafer fabrication processes. Extensive automation of the basic TEM operation and measurement procedures minimizes requirements for operator...
FEI Life Sciences (acquired by Thermo Fisher)