LINEAR STAGE
Apr 1, 2007 — PI (Physik Instrumente) LP’s M-511.HD hybrid nanopositioning translation stage provides travel ranges to 100 mm, 4-nm linear encoder resolution, millisecond set-tling time with nanometer accuracy, active compensation of stick/slip during start-up and settling, active backlash compensation and good velocity control. Load capacity is 100 kg. The C-702 controller reads the stage position and continuously actuates both the piezoelectric and servo motor drives. It can handle encoder count rates of...
PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics