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integrated circuits White Papers
Novel Micro-optics Solutions Through Monolithic Integration of Microlenses and Prisms
SUSS MicroOptics is a global leader in micro-optics technology and manufacturing. Innovative combination of process technology has allowed SUSS MicroOptics to integrate micro-lenses and prisms on wafer-scale. In combination with the comprehensive offering of AR coating, metallization and glue management options, SUSS MicroOptics provides a powerful toolbox to design breakthrough solutions for advanced photonics assembly and packaging.
Analysis of Metallic Impurities in Organic Solvents Used in IC Fabrication With ICP-MS
Even though Integrated Circuit (IC) fabrication takes place inside the highly controlled cleanroom environment, contaminants from process chemicals, such as Isopropyl alcohol, account for over 50% of Integrated Circuits' production losses. Chemical...
Fabricating Low Loss GeO
2
Thin Films for Planar Waveguides Such as Photonic Integrated Circuits
High quality GeO2 thin films that exhibit low loss and low surface roughness were produced by Intlvac’s Nanochrome IV PARMS system, proving that ion assisted AC dual sputtering is an effective fabrication technique. This is highly applicable to...
(3 results found)
May 2024
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