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lithography Dictionary Terms

electron storage ring
An advanced magnetic device used in x-ray lithography to beam x-rays onto the surface of silicon wafers used for semiconductor circuits.
lattice
In photonics, a lattice refers to a periodic arrangement of optical elements or structures, often on a microscopic or...
nanopositioning
Nanopositioning refers to the precise and controlled movement or manipulation of objects or components at the nanometer...
beam shaper
A beam shaper is an optical device or system designed to modify the spatial profile or intensity distribution of a laser or...
extreme ultraviolet
Extreme ultraviolet (EUV) refers to a specific range of electromagnetic radiation in the ultraviolet part of the spectrum....
lithography
Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the...
excimer laser
An excimer laser is a type of ultraviolet laser that emits short pulses of light in the ultraviolet spectrum. The term...
near-field holography
A lithography method that allows the transfer of fine-pitch gratings from a phase mask into photoresist. The exposure takes...
electron-gun system
An electron-gun system is an assembly used to generate and control a focused beam of electrons. Electron guns find...
masks for evaporation/deposition
In the context of thin film deposition processes such as evaporation or sputtering, masks are used to selectively deposit...
phase mask
In optics and photolithography, a phase mask refers to a device that modifies the phase of light waves passing through it....
x-ray lithography
A method of projecting integrated circuit patterns on a silicon wafer using x-ray wavelengths focused through a special mask.
mask proximity correction
A technique used in photolithography of computer chips to compensate for errors caused by the proximity effect, which...
electron-beam lithography system
An electron-beam lithography (EBL) system is a sophisticated nanofabrication tool used in the semiconductor industry and...
fused quartz and silica
Fused quartz and silica are closely related materials, both composed primarily of silicon dioxide (SiO2), but they are...
photoemulsion
In photolithography, an opaque material used in masks that has a lower optical density and grainier composition than chrome.
microlithography
A technique for producing micron-size structures on surfaces by using short-wavelength light or electron beams.
micro-optics
Micro-optics refers to the design, fabrication, and application of optical components and systems at a microscale level....
wafer
In the context of electronics and semiconductor manufacturing, a wafer refers to a thin, flat disk or substrate made of a...
nanoimprint lithography
Nanoimprint lithography (NIL) is a nanolithography technique used for fabricating nanoscale patterns on a substrate. It is a...
photoresist
Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of...
photonic crystals
Photonic crystals are artificial structures or materials designed to manipulate and control the flow of light in a manner...
negative-refraction metamaterial
An artificial material, engineered to have a negative refractive index value, such that light or any other form of...
deep ultraviolet
Deep ultraviolet (DUV or deep-UV) refers to a specific range of ultraviolet light with shorter wavelengths than those in the...
photomask
A photomask, also known simply as a mask or reticle, is a key component in the photolithography process used in...
mask
1. A framelike structure that serves to restrict the viewing area of the screen when placed before a television picture...
stereolithography
A method of creating real three-dimensional models by using lasers driven by CAD software. In contrast to the normal...
proximity effect
The underexposure caused by the diffraction of light passing through small openings spaced closely together in masks used in...
binary optics
Optical elements, often created by micromachining, lithography or vacuum deposition, that rely on diffraction of the...
photolithography
Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and...
additive manufacturing
Additive manufacturing (AM), also known as 3D printing, is a manufacturing process that involves creating three-dimensional...

(31 results found)

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