Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a crucial component in the patterning of...

Liquid crystal on silicon (LCoS) is a display technology that combines liquid crystal materials with silicon-based...

A MEMS fiber optic switch is a microelectromechanical system (MEMS) device designed to selectively route optical signals...

An accelerometer is a sensor or transducer that measures the rate of change of velocity of an object, or in simpler terms,...

An electron-beam lithography (EBL) system is a sophisticated nanofabrication tool used in the semiconductor industry and...

Optical fiber optic switches are devices used in optical fiber communication systems to selectively route optical signals...

In the context of thin film deposition processes such as evaporation or sputtering, masks are used to selectively deposit...

Refers to micron-size complex machines that have physical dimensions suitable for the fabrication of optical switches for...

The Casimir force is a quantum phenomenon that results in an attractive force between two closely spaced uncharged...

In the context of electronics and semiconductor manufacturing, a wafer refers to a thin, flat disk or substrate made of a...

Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the...

Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and...

Micro-robotics refers to the field of robotics that involves the design, development, and application of miniature robotic...