Ultrafast Bursts Extend Chip Lithography Below Surface
MARSEILLE, France, Nov. 22, 2022 — Because semiconductors serve as the backbone of modern technologies including cellphones, cars, robots, and other devices, the continuous need for miniaturized and powerful chips is placing increased pressure on semiconductor manufacturing technologies. The dominant technology, lithography, is limited in its ability to address these challenges, given its surface-processing nature. When intense light from ultrafast lasers is focused inside a semiconductor, highly efficient nonlinear