Photonics Dictionary

Deep ultraviolet (DUV or deep-UV) refers to a specific range of ultraviolet light with shorter wavelengths than those in the UV-A and UV-B regions. The exact wavelength range considered as DUV can...

An advanced magnetic device used in x-ray lithography to beam x-rays onto the surface of silicon wafers used for semiconductor circuits.

Extreme ultraviolet (EUV) refers to a specific range of electromagnetic radiation in the ultraviolet part of the spectrum. EUV radiation has wavelengths between 10 and 124 nanometers, which...

Laser annealing is a process that involves using a laser beam to heat and modify the microstructure of a material, typically a thin film or surface layer, with the objective of improving its...

A process used in the design, repair and customization of integrated circuits. A low-power laser etches a silicon wafer placed inside a gas-filled vacuum chamber, initiating a chemical reaction.

Liquid crystal on silicon (LCoS) is a display technology that combines liquid crystal materials with silicon-based semiconductor technology to create high-resolution, high-quality images. LCoS...

Lithography is a key process used in microfabrication and semiconductor manufacturing to create intricate patterns on the surface of substrates, typically silicon wafers. It involves the transfer of...

1. A framelike structure that serves to restrict the viewing area of the screen when placed before a television picture tube. 2. In photolithography, a photomask (or mask) is typically a patterned...

Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS). It is a photomechanical process used to transfer...

Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of semiconductor devices, integrated circuits, and microelectromechanical systems (MEMS)....

Sputtering equipment is machinery used in the process of physical vapor deposition (PVD), specifically sputtering. Sputtering is a method of depositing thin films of material onto a substrate surface...

A substrate refers to a material or surface upon which another material or process is applied or deposited. In various fields, such as electronics, biology, chemistry, and manufacturing, the term...

A method of projecting integrated circuit patterns on a silicon wafer using x-ray wavelengths focused through a special mask.