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EUV Multilayer Mirrors

  • Model: EUV Multilayer Mirrors
  • Company: NTT Advanced Technology Corporation
  • Type: Mirrors
  • Diameter / Dimension: 5mm - 300mm
  • Applications: Astronomy, Biomedical/Medical, Industrial, Scientific Research
  • Substrate Roughness: ≤0.3 nm rms
  • Surface Figure: ≤ 1/10 wave
  • Effective Area: ≥90%
  • Wavelength Region: 8 nm ~ 50 nm

Reflectivity: 35% @ 8 nm, 68% @ 13.5 nm, 46% @ 30 nm

Coating Material: Ru/B4C, Mo/Si, Zr/AlSi, SiC/Mg

Surface Figure: <1/10 wave (flat, spherical, concave) <1 wave (ellipsoidal, parabolic)
EUV Multilayer Mirrors

NTT Advanced Technology Corporation
Tokyo Opera City Tower
3-20-2, Nishi-shinjuku
Shinjuku, Tokyo 163-1436
Japan
Phone: +1 408-474-0214
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