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Industrial Vertical Stage

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MKS Instruments Inc.
ANDOVER, Mass., March 28, 2018 — The Newport IDL280-Z20 vertical stage available from MKS Instruments Inc. is designed for industrial applications that require high load capacities. Based on a modular wedge design, the IDL280-Z20 provides minimum incremental motion of 0.1 µm over 20 mm of travel with smooth motion for fine positioning. A precision ball screw drive with a 2-mm pitch is able to move loads up to 500 N with a speed of 5 mm/s. With high stiffness of 10 µrad/Nm, the Newport vertical industrial stage is ideal for advanced XY systems with high dynamic performance. Like all IDL stages, the...See full product

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