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Linear Stage

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PI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo Mechanics
The miCos MCS XY precision linear stage from PI (Physik Instrumente) LP offers resolution up to 5 nm and 0.2 µm repeatability for optical inspection of precision machined parts, material research, microscopy applications and topographical measurements in semiconductor and flat panel design. The two-axis positioning system, driven by the SMC Hydra motion controller, can handle loads up to 45 lb and can achieve velocity ranges from 1 µm/s to 200 mm/s. The stage provides 102 mm of positioning range in both axes and achieves ±2-µm straightness/flatness of motion. It...See full product

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