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Mask Alignment System

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EV Group (EVG)
For LED manufacturing, EV Group has announced the EVG620HBL, the second-generation fully automated mask alignment system for volume manufacturing of high-brightness LEDs. It delivers a tool platform tailored to address high-brightness LED customer-specific needs and the demand for cost-of-ownership reduction. It also optimizes tool footprint in the fab, delivering 55% higher wafer output for every square meter of cleanroom space compared to competitive offerings, according to the company. New features include an enhanced microscope that supports automated mask pattern search,...See full product

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