PIEZO STAGE
Jan 1, 2008 — A piezo stage with a positioning range of 150 × 150 mm, ≤50-nm accuracy, <30-nm repeatability and 10-nm resolution has been introduced by Technobis Mechatronics BV. Comprising a lightweight X-Y table assembly, four high-precision guiding rails, two piezomotors with a controller and two noncontact linear encoders, the stage is suitable for use in laser marking systems, biotechnology, life sciences, inverted microscopes, micromachining, semiconductor test equipment and R&D...
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