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PI Physik Instrumente - Semiconductor Applications 5/24 ROS LB
photolithography Dictionary Terms

fused quartz and silica
Fused quartz and silica are closely related materials, both composed primarily of silicon dioxide (SiO2), but they are produced through different manufacturing processes and have distinct properties and applications. fused quartz and silica...
photolithography
Photolithography is a key process in the manufacturing of semiconductor devices, integrated circuits, and...
wafer
In the context of electronics and semiconductor manufacturing, a wafer refers to a thin, flat disk or substrate made of a...
mask proximity correction
A technique used in photolithography of computer chips to compensate for errors caused by the proximity effect, which...
photoresist
Photoresist is a light-sensitive material used in photolithography processes, particularly in the fabrication of...
phase mask
In optics and photolithography, a phase mask refers to a device that modifies the phase of light waves passing through it....
photoemulsion
In photolithography, an opaque material used in masks that has a lower optical density and grainier composition than chrome.
photomask
A photomask, also known simply as a mask or reticle, is a key component in the photolithography process used in...
micro-optics
Micro-optics refers to the design, fabrication, and application of optical components and systems at a microscale level....
mask
1. A framelike structure that serves to restrict the viewing area of the screen when placed before a television picture...
excimer laser
An excimer laser is a type of ultraviolet laser that emits short pulses of light in the ultraviolet spectrum. The term...
masks for evaporation/deposition
In the context of thin film deposition processes such as evaporation or sputtering, masks are used to selectively deposit...
proximity effect
The underexposure caused by the diffraction of light passing through small openings spaced closely together in masks used in...

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