High-Resolution Measurement of Film Thickness and Refractive Index for Silicon Photonics and Planar Waveguide Applications

Dec 6, 2023
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Presented by
Bruker Nano Surfaces
About This Webinar

Silicon photonics and planar waveguide technologies have become integral components in the rapidly evolving landscape of optical communication, sensing, and integrated photonics. Planar waveguides are the building blocks of numerous photonic components, such as modulators, detectors, multiplexers, and switches. The precise characterization of film thickness and refractive index within these structures is paramount for optimizing device performance.

This webinar provides an overview of advanced measurement technologies tailored to meet the high-resolution demands of silicon photonics and planar waveguide applications. Lawrence Rooney of Bruker shares about state-of-the-art film thickness and refractive index measurement techniques, including multi-angle spectroscopic reflectometry and ellipsometry, and discusses their respective advantages, limitations, and suitability for different types of multi-layer photonic structures. He also highlights the critical importance of high-resolution film thickness and refractive index measurement techniques in the advancement of silicon photonics and planar waveguide applications. By providing a comprehensive overview of state-of-the-art methodologies and their practical implications, this presentation serves as a valuable resource for researchers, engineers, and scientists working in the field of silicon photonics and planar waveguides, facilitating the development of next-generation photonic devices with enhanced performance and functionality.

Who should attend:
R&D scientists, engineers, manufacturers, and researchers who work with silicon photonics and planar waveguides. Optical scientists who perform test and measurement. Those who work with coatings, detectors, materials, nanophotonics, and spectroscopy in numerous industries such as aerospace, communications, energy, medical, and semiconductors.

About the presenter:
Lawrence Rooney has over 10 years of experience in the semiconductor industry working with a variety of metrology devices, including secondary ion mass spectrometry, x-ray photoelectric spectroscopy, x-ray fluorescence, and reflectometry/scatterometry. He has extensive experience qualifying and installing multiple metrology tools in semiconductor fabs and labs around the world. In his current position at Bruker, Rooney partners with customers to develop measurement solutions and solve challenging metrology applications.


About Bruker:
Bruker is enabling scientists to make breakthrough discoveries and develop new applications that improve the quality of human life. Bruker’s high-performance scientific instruments and high-value analytical and diagnostic solutions enable scientists to explore life and materials at molecular, cellular, and microscopic levels. In close cooperation with our customers, Bruker is enabling innovation, improved productivity, and customer success in life sciences molecular research, microscopy and nanoanalysis, and industrial applications.

Research & Technologyintegrated photonicsOpticslensessilicon photonicsCommunications
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