Request InfoCyberOptics Corp.CyberOptics Semiconductor Inc.’s WaferSense Auto Gapping System, the AGS300, is available in 300- and 200-mm form factors. It measures gaps that are critical to the outcome of semiconductor processes such as thin-film deposition, sputtering and etching. Consisting of three capacitive distance sensors, the system measures the gaps between showerheads and pedestals at three points that define a plane to ensure accurate and reproducible equipment setups. Using the system, engineers can better control gap uniformity and magnitude with high stability over time. It provides wireless...See full productRelated content from Photonics MediaPRODUCTSPhotonics Spectra August 2023 IssueWarpage Metrology ToolThe Wave3000 warpage metrology tool from ERS electronic GmbH is designed for advanced packaging wafers and the semiconductor manufacturing industry. 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