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Positioning System Performance: Understanding the Rules

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To make the right decisions and to ensure satisfactory performance in a positioning system, it is necessary to first have a grasp of performance parameters and an understanding of their definitions.

Newport Corporation

Abbe Error — Linear off-axis errors introduced by angular deviations coupled to a moment arm at the point of interest on stage mounted devices (θ in Figure 1). The effect of Abbe error will appear as linear runout δx, but unlike true linear runout, it can be minimized by reducing the moment arm. As seen in Figure 1, the relation between the angular deviation and corresponding linear error is linearly proportional to moment arm length and the sine of the deviation angle. Also known as Sine Error. Figure 1. Relation of runout, δx, to angular deviation,θ, of a...Read full article

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