Request InfoPI (Physik Instrumente) LP, Motion Control, Air Bearings, Piezo MechanicsAUBURN, Mass., June 19, 2015 — PI (Physik Instrumente) LP has announced the PIglide HS planar X-Y air bearing stage, designed to maximize throughput while providing precision. The device uses magnetically preloaded air bearings on the Y axis and a vacuum preloaded X-Y puck that floats on the reference surface. The crossbeam mounts to the Y axis via a flexural coupling that provides yaw compliance without sacrificing system stiffness. Suitable for wafer inspection and scribing applications, the PIglide is also suited for other ultraprecision motion applications such as flat panel inspection.See full productRelated content from Photonics MediaPRODUCTSPhotonics Spectra January 2023 IssueSteering MirrorsPiezo and voice-coil steering mirrors from Physik Instrumente LP are designed for free space optical communications. 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