Integrated Vertical and Rotation Stage
IRVINE, Calif., June 27, 2012 — Newport Corp. has launched an integrated vertical and rotation stage, the ZVR, for semiconductor wafer positioning, metrology, inspection and repair. It also is useful in LED production, 3-D scanning, digitizing models and validation applications.
It features a rigid design with improved cantilevered load capacity, lower crosstalk and higher dynamic system performance than offered by earlier designs. With a low-profile footprint, low mass and a high natural frequency, the stage...
MKS/Newport